System Modelling and Optimization for Digitally Supported Plasma Processing

Alasdair Mitchell,Long Ye,Yunhao Xu,Bo Wang,Jonathan Corney,Xingyu Li,Nan Yu
DOI: https://doi.org/10.1016/j.procir.2024.10.306
2024-01-01
Procedia CIRP
Abstract:The industry 4.0 movement has catalyzed the innovation of digital technologies within the engineering field, offering a variety of simulation and optimization methods. Namely, the digital twin method has enabled real-time visualization and optimization of manufacturing processes. However, the complexity of multi-physic plasma-based manufacturing operations presents challenges for digital integration. Plasma processing, a high-energy, ionized gas-based technique, demands thorough characterization for effective virtualization. While existing literature primarily focuses on framework developments for plasma DTs, challenges persist in achieving productivity, geometrical accuracy, and quality assurance. This research supports developments to mitigate these challenges by presenting a one-dimensional system model of plasma processing equipment, emphasizing energy efficiency improvements. The model integrates power generation, fluid systems, and heat transfer domains, allowing comprehensive analysis at a system level. Through data integration and validation, the model demonstrates its capability to replicate real-world plasma parameters through simulation results, highlighting upon the thermal dynamics. This research lays a foundation for future advancements in digital manufacturing, not only in plasma processing but also in other complex processes, thereby paving the way for innovative approaches in the manufacturing industry.
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