Rapid High-Precision Machining of LTCC Utilizing Water-Jet Guided Laser Technology: Expanding the Horizons of Functional Ceramic Processing

Yulu Zhang,Yuying Wang,Jiacheng Hu,Lijing Zhong,Zihuai Su,Bin Qian,Xiaofeng Liu,Ye Dai,Juan Song,Shengzhi Sun,Jianrong Qiu
DOI: https://doi.org/10.1016/j.mtcomm.2024.111013
IF: 3.8
2024-01-01
Materials Today Communications
Abstract:Low temperature co-fired ceramic (LTCC) has become the ideal substrate material for the next generation of circuit boards. However, due to their brittle nature, high-precision cutting of LTCC without edge breakage and heat-affected zones has been a significant challenge. In this paper, water-jet guided laser (WJGL), as a new machining method for brittle material, was employed to process LTCC and result in high-quality cutting. LTCC substrates with a thickness of 1.6mm were processed without any movement of the z-axis cutting head, thus maximizing cutting efficiency. The grooves with a maximum aspect ratio of 25.6, a taper angle of 0.2° and a minimum cross-sectional roughness of 5.61µm were obtained after optimization (laser power of 20W, cutting speed of 5mm/s and water pressure of 30MPa). Furthermore, the results show that by gradually increasing the laser power up to 32W, the molten layer and debris at the edges of the microgroove cuts were significantly reduced, resulting in extremely high straightness. In addition, the oxidation mechanism of the microgrooves was thoroughly investigated by material analysis. Compared with conventional laser processing method, WJGL demonstrates superior cutting quality and higher cutting efficiency, thereby favoring the integration and miniaturization of multifunctional circuits. Overall, our results reveal the considerable potential of the WJGL for processing highly brittle materials.
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