Transverse Differential Confocal Measurement Method with Large Linear Sensing Range

Xin Zheng,Yuhan Liu,Yuan Fu,Lirong Qiu,Weiqian Zhao
DOI: https://doi.org/10.1016/j.measurement.2024.115889
IF: 5.6
2025-01-01
Measurement
Abstract:To address the problem of a small linear sensing range in differential confocal measurement methods, this study proposes a large linear sensing range measurement method for a laser differential confocal (LDC) based on transverse split-spot detection using a multi-element detector (MED). This method converts the axial defocusing change of the measured object surface into transverse movement of the spot on the detected focal plane through the principle of transverse differential confocal (TDC), where the intensity of the spot on the focal plane is split and detected by MED. Two-by-two differential subtraction and normalization are processed to obtain multiple sets of normalized TDC response curves, which realize a large-range sensing confocal measurement without sacrificing the high-resolution axial fixed-focus measurement. The analytical and experimental validation shows that the axial resolution of this method is 0.5 nm, the linear sensing range is up to 13.667 mu m, which is about 11.4 times of the linear sensing range of TDC, and the maximum fitting error is 2.3 nm in the large sensing measurement range. This provides a new method for high-precision, large-range, and fast sensor-scanning measurement of precision element surfaces.
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