Abstract:Confocal microscopy remains a major workhorse in the 3D surface topography measurement owing to its reliability and compatibility for workpieces with various reflectance, which, however, suffers from slow scanning speed and limited axial resolution. Commercial confocal microscopy primarily relies on the axial movement of a sample or objective lens to create a series of 2D image stacks, and then reconstruct 3D map. Nevertheless, most samples and objective lens are too bulky to scan rapidly, let alone that multiple scans are required to increase the signal-to-noise ratio (SNR). To address this issue, an original approach named illumination -detectionsynchronized confocal microscopy was developed, which enabled high -precision fast axial scanning via a compact fiber -multiplexed port with the high-speed synchronous motion of point source and point detection. The approach can effectively improve the peak localization precision while not requiring a high -precision motion stage. Theoretically, via controlling the magnification of the optical system M > 1, the total peak localization precision of axial light intensity response curve can be improved by M-3 times. Experiments show that the singlepoint repeat measurement precision by this approach is improved by 4 times, and the profile measurement precision is enhanced by 2.3 times. Moreover, this approach can effectively avoid collisions between the sample and objective lens, and has the potential to design a low-cost single -point confocal sensor or confocal profilometer.

Digital Differential Confocal Microscopy Based on Spatial Shift Transformation.

A lateral differential confocal microscopy for accurate detection and localization of edge contours

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

High-accuracy Differential Autofocus System with an Electrically Tunable Lens.

Image Scanning Fluorescence Emission Difference Microscopy Based On A Detector Array

Three-Dimensional Resolution and Contrast-Enhanced Confocal Microscopy with Array Detection

Diffraction Phase Microscopy Realized with an Automatic Digital Pinhole

Differential Confocal Microscopy with A Wide Measuring Range Based on Polychromatic Illumination

Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm

Dynamic Confocal Optical Probe Based on Time Difference Measurement

The Optical Probe Using Differential Confocal Technique For Surface Profile

Improved Differential Confocal Microscopy with Ultrahigh Signal-to-noise Ratio and Reflectance Disturbance Resistibility.

Theoretical Analysis and Property Study of Optical Focus Detection Based on Differential Confocal Microscopy

Novel Vertical Scanning Algorithm With Advanced Control to Increase Range and Accuracy of Differential Confocal Microscopy

Axial Range Expansion Method for Multi-Differential Confocal Three-Dimensional Imaging

A Differential Confocal Sensor for Simultaneous Position and Slope Acquisitions Based on a Zero-Crossing Prediction Algorithm

Innovative full-field chromatic confocal microscopy using multispectral sensors

Virtual Double-Slit Differential Dark-Field Chromatic Line Confocal Imaging Technology

Differential internal multi-reflection method for nano-displacement measurement

An Autofocus Method Based on Improved Differential Confocal Microscopy in Two-Photon Lithography

In-fiber Illumination-Detection-synchronized Confocal Microscopy for High-Precision Fast Axial Scanning