Terahertz-based Thickness Measurement of Multilayer Thin Film Using Sparse Representation

Yuqing Cui,Yafei Xu,Donghai Han,Shuming Wu,Zhibo Yang,Yushan Hou,Liuyang Zhang
DOI: https://doi.org/10.1109/irmmw-thz60956.2024.10697675
2024-01-01
Abstract:Accurate thickness measurement of multilayer thin film remains a long-standing challenge for terahertz (THz) techniques due to the disturbance caused by multiple reflections and dispersion. This work proposes a novel strategy for thickness measurement based on the time-of-flight to automatically determine the thicknesses of the multilayer thin films. The strategy initially determines the rough positions of the layers using peak-finding methods, and then decomposes the THz time-domain signal using sparse representation techniques. Finally, the extracted impulse responses are mapped to the layers using a clustering method to determine their thicknesses. In thickness measurements of four layers of film, the proposed method has an average error of 2.88%, which is only one-third of that of the direct time-of-flight method. This indicates great potential for the automatic thickness measurement of thermal barrier coatings and paintings.
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