Integrated Deep-Ultraviolet Micro-LED Array with Ultralow Contact Resistance and Ultrahigh Bandwidth for Intermixed Solar-Blind Optical Wireless Communication

Rui Wang,Huabin Yu,Muhammad Hunain Memon,Zhixiang Gao,Yuanmin Luo,Yang Kang,Yuchen Du,Zeyu Tang,Haiding Sun
DOI: https://doi.org/10.1109/led.2024.3472009
IF: 4.8157
2024-01-01
IEEE Electron Device Letters
Abstract:In this work, we report an integrated deep-ultraviolet (DUV) micro-LED array consisting of two distinct device sizes: one is 35 × 35 μm 2 and the other is 100 × 100 μm 2 (namely, 35-μm-LED and 100-μm-LED), which are fabricated with a shared common n-type electrode. Under individual device tests, we revealed that both 35-μm-LED and 100-μm-LED possess ultralow contact resistances of only 51 Ω and 13 Ω, respectively, while also exhibiting high bandwidth values of 527 MHz and 372 MHz, respectively, obtained in DUV optical wireless communication (DUV OWC). These values are among the best-reported values in the literature for similar micro-LEDs. Essentially, by integrating these two types of micro-LEDs on a single chip, we successfully demonstrated intermixed signal transmission and communication, which has great potential for future secured DUV OWC applications.
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