Application and Optimization of Laser-Assisted Bonding (LAB) in Multi-Chip Integration

Chengyong Zhang,Ziyu Liu,Shijin Ding,Jason Ho,Zhi Zhu,Cheng Zhang
DOI: https://doi.org/10.1109/icept63120.2024.10668613
2024-01-01
Abstract:Multi-chip integration on the large substrate for Chiplets technology has emerged as a prevailing trend in the semiconductor industry. Thus, large substrates are urgently demanded. However, warpage is quite serious for this kind of substrate. This study presents a solution to this problem by laser-assisted- bonding (LAB) technology, which utilizes instantaneous laser heating to achieve melting and bonding. We have developed a LAB-X-100 series equipment that effectively bonds the flip-chip devices to a large substrate. This largely reduces the substrate warpage from over 150 $\mu \mathrm{m}$ to less than 50 $\mu \mathrm{m}$ .
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