Research Progress on Silicon-Based Optical Phased Array Chips and Detection Methods for LiDAR(Invited)

Hu Heming,Li Jie,Chen Baisong,Zhi Zihao,Li Xuetong,Qu Huan,Wang Weipeng,Tao Min,Li Yingzhi,Song Junfeng

DOI: https://doi.org/10.3788/aos240940

2024-01-01

Acta Optica Sinica

Abstract:Significance Through emitting light signals and detecting the echo signal of the target,LiDAR can obtain the position,velocity,and other characteristic quantities of the target.Compared with traditional millimeter wave radar,LiDAR features a shorter working wavelength,leading to higher resolution,longer detection distance,and stronger anti-interference capacity.With the above advantages,LiDAR has developed over the past decade,receiving widespread attention in many fields such as autonomous driving,remote sensing measurement,and space communication.At present,commercial LiDAR is mainly mechanical,which achieves two-dimensional beam turning by controlling mechanical rotating components(such as reflectors and prisms)to obtain environmental perception in a large field of view.However,mechanical rotation limits the scanning speed and reduces the reliability of the device.Due to its large size and low accuracy,its detection performance is severely affected by rotational inertia and service life.As an alternative to mechanical LiDAR,all-solid-state LiDAR has received widespread attention in recent years.All-solid state LiDAR mainly consists of micro-electromechanical(MEMS)type,Flash type,and optical phased array(OPA)type.MEMS LiDAR achieves electric field driving of laser position by integrating millimeter-level reflector structures and changes the tilt angle of the reflector by applying different voltages to achieve beam scanning control.However,due to the tiny movable units inside MEMS LiDAR,it cannot be considered an authentic all-solid-state LiDAR.Flash-type LiDAR can emit a large area of laser signals forward in a short period of time.However,as the emitted laser power is fixed,when the detection area increases,the power per unit area will decrease,significantly narrowing the detection distance and lowering the accuracy.Compared to traditional mechanical LiDAR,the optical phased array has become the research and development hot spot of all-solid-state LiDAR thanks to its high reliability,arbitrary directionality,and fast beam steering ability.At present,various beam pointing technologies based on optical phased arrays have been reported,including liquid crystal optical phased arrays,meta-surface optical phased arrays,and silicon-based optical phased arrays.With the rapid development of silicon photonics technology and its high compatibility with CMOS processes,on-chip optical phased arrays based on silicon photonic integration are expected to effectively reduce device manufacturing costs while ensuring large-scale integration. Progress In section 2,we introduce the basic characteristics of OPA chips and summarize the research process on OPA design.Section 2.1 presents the basic structure of OPA chips.1D-OPA and 2D-OPA are shown(Fig.1).Section 2.2 expounds on the research progress on optical phased array chips.The optimization method for the horizontal field of view is presented in section 2.2.1.Figure 2(a)shows the waveguide array structure based on unequal width.A real optical phased array with unequal width waveguide array is shown in Fig.2(b).Figures 2(c)and(d)present the sinusoidal waveguide array structure.Figure 3(a)demonstrates the optical phased array grating structure based on flat grating.Fig.3(b)shows the optical phased array chip based on flat grating.Figure 3(c)presents the optical phased array structure based on the trapezoidal flat grating,and Figs.3(d)and(e)are the supplement for the structure.Figure 4 shows the optical phased array chip structure with a non-equidistant design.We introduce the optimization method for the vertical field of view in section 2.2.2.The structure of the sub-OPA array based on OSW is shown in Figs.5(a)and(b).The structure of the OPA with polarization multiplexing is shown in Figs.5(c)and(d).The structure of OPA with lens assist is shown in Figs.5(e)and(f).In section 2.2.3,we introduce the research progress on lateral divergence angles.Figures 6(a)and 6(b)show the spot size emitted from large aperture OPA.We also propose other methods to decrease the lateral divergence.Figures 7(a)and 7(b)show the spot size optimized by the non-equidistant method.In section 2.2.4,we deal with the research progress on the vertical divergence angle.Among them,the performance of the apodized grating is shown in Fig.8.The grating of the Si/SiN hybrid structure is shown in Fig.9.We introduce the optimization of OPA's emitting power and modulation power consumption in sections 2.2.5 and 2.2.6,respectively.Figure 10 demonstrates the method for OPA with high emitting power.In section 3,we summarize the optical phased array LiDAR system based on two ranging principles.In section 3.1,we introduce the development status of OPA LiDAR based on TOF.Figure 11 shows the time flight method.Figures 12 and 13 show the TOF-based optical phased array LiDAR designed by Samsung Electronics and Busan University,respectively.In section 3.2,we describe the development status of OPA LiDAR based on FMCW.Figure 14 shows the FMCW method.Figures 15 and 16 are the OPA-based LiDAR designed by MIT and Analog Photonics.Figures 17 and 18 are the OPA LiDAR results demonstrated by Shanghai Jiao Tong University and Jilin University in China. Conclusions and Prospects The application of high-performance and highly integrated optical phased array LiDAR still requires further research.With the rapid development of modern semiconductor technology and relevant materials,it is hopeful that the commercial application of optical phased array LiDAR in intelligent driving will be achieved in the near future.