A Driving–Clamping Integrated Inchworm Linear Piezoelectric Actuator with Miniaturization and High Thrust Density

Jinghan Guan,Shijing Zhang,Jie Deng,Junkao Liu,Yingxiang Liu
DOI: https://doi.org/10.1109/tie.2024.3417984
IF: 7.7
2024-01-01
IEEE Transactions on Industrial Electronics
Abstract:This article presents an inchworm linear piezoelectric actuator (ILPA) to address the prevalent issues of bulk and complexity in existing ILPAs. It has the characteristics of miniaturization with a size of 44 x 13 x 24 mm(3) and a weight of 36.0 g. It integrates multiple functions within a compact form factor. The mechanical structure is simplified to a stator and an output shaft. The integrally machined stator is used as a guide unit without additional guideways and components. A key feature of the ILPA is its integrated driving mechanism that combines driving and clamping actions. This mechanism is designed as a bridge-type displacement amplifier, where the main displacement serves the driving function, while the parasitic displacement provides the clamping action. Experimental results show that the ILPA achieves a maximum speed of 1691.8 mu m/s under the condition of square wave excitation with a frequency of 417 Hz and an input voltage of 120 V. Furthermore, it delivers a thrust of 1.5 N and a self-locking force of 2.1 N. Its force-to-volume ratio with a thrust density of 1.09 x 10(-4) N/mm(3) stands out. It has been successfully employed in several practical applications, including detecting chips and microscopic observation tasks.
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