Abstract:Semiconductor heterostructures provide an ideal platform for studying high-mobility, low-density electrons in reduced dimensions. The realization of superconductivity in heavily doped diamond, silicon, silicon carbide and germanium suggests that Cooper pairs eventually may be directly incorporated in semiconductor heterostructures, but these newly discovered superconductors are currently limited by their extremely large electronic disorder. Similarly, the electron mean free path in low-dimensional superconducting thin films is usually limited by interface scattering, in single-crystal or polycrystalline samples, or atomic-scale disorder, in amorphous materials, confining these examples to the extreme 'dirty limit'. Here we report the fabrication of a high-quality superconducting layer within a thin-film heterostructure based on SrTiO(3) (the first known superconducting semiconductor). By selectively doping a narrow region of SrTiO(3) with the electron-donor niobium, we form a superconductor that is two-dimensional, as probed by the anisotropy of the upper critical magnetic field. Unlike in previous examples, however, the electron mobility is high enough that the normal-state resistance exhibits Shubnikov-de Haas oscillations that scale with the perpendicular field, indicating two-dimensional states. These results suggest that delta-doped SrTiO(3) provides a model system in which to explore the quantum transport and interplay of both superconducting and normal electrons. They also demonstrate that high-quality complex oxide heterostructures can maintain electron coherence on the macroscopic scales probed by transport, as well as on the microscopic scales demonstrated previously.

High-mobility Carriers and Superconductivity at the SrNbO 3-Srtio 3 Interface

High-mobility Carriers and Superconductivity at the SrNbO3−SrTiO3 Interface

Dimensionality-confined superconductivity within SrNbO3-SrTiO3 heterostructures

High valley-degeneracy electron gas at double perovskite - strontium titanate interface

Reentrance of Interface Superconductivity in a High-Tc Cuprate Heterostructure

Metallic capped quasi-two-dimensional electron gas in a SrTiO 3 -based heterostructure

Transport abnormity and its modulations via gating effect and light illumination at the SrNbO3/SrTiO(3)interface

High-Mobility Two-Dimensional Electron Gases at Oxide Interfaces: Origins and Opportunities

Coexistence of high electron-mobility, unpaired spins, and superconductivity at high carrier density SrTiO$_3$-based interfaces

Unravelling Oxygen-Vacancy-induced Electron Transfer at SrTiO3-based Heterointerfaces by Transport Measurement During Growth

A high-mobility two-dimensional electron gas at the heteroepitaxial spinel/perovskite complex oxide interface of γ-Al2O3/SrTiO3

Two-Dimensional Electron Gas with High Mobility Forming at BaO/SrTiO3 Interface

The density and disorder tuned superconductor-metal transition in two dimensions

Electron microscopy and spectroscopy investigation of atomic, electronic, and phonon structures of NdNiO2/SrTiO3 interface

Metallic and insulating interfaces of amorphous SrTiO3-based oxide heterostructures

Two-dimensional normal-state quantum oscillations in a superconducting heterostructure

A high-mobility electron gas at the LaAlO3/SrTiO3 heterointerface

High-mobility spin-polarized two-dimensional electron gas at the interface of LaTiO3/SrTiO3 (110) heterostructures

Atomic Heterointerfaces in La0.7Sr0.3MnO3/SrIrO3 Superlattices

Interface enhanced superconductivity in FeSe/SrTiO<sub>3</sub> and the hidden nature

High-mobility spin-polarized quasi-two-dimensional electron gas and large low-field magnetoresistance at the interface of EuTiO3/SrTiO3 (110) heterostructures