Real-Time Iterative Compensation Control Using Plant-Injection Feedforward Architecture with Application to Ultraprecision Wafer Stages

Ran Zhou,Chuxiong Hu,Ze Wang,Yu Zhu,Masayoshi Tomizuka
DOI: https://doi.org/10.1109/tii.2024.3413294
2024-01-01
Abstract:This article presents a novel real-time iterative compensation (RIC) method using plant-injection feedforward architecture for motion control of ultraprecision wafer stages, addressing the severe challenge of achieving extreme tracking accuracy along with strong task flexibility and disturbance rejection ability. The RIC method establishes an online prediction model to accurately predict upcoming tracking errors during real-time motion. The prediction result enables the online generation of optimal plant-injection feedforward signal at each sampling control instant via iterative calculation, which enhances tracking accuracy and dynamical regulation capability. Various trajectory tracking tasks have been implemented on an ultraprecision wafer stage. Experimental results demonstrate that RIC matches the high tracking accuracy of well-acknowledged iterative learning control while offering superior task flexibility and disturbance rejection ability.
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