Adaptive Real-Time Iterative Compensation Control Framework for Ultraprecision Motion Tasks

Ran Zhou,Chuxiong Hu,Ze Wang,Yu Zhu
DOI: https://doi.org/10.1109/iciea61579.2024.10665218
2024-01-01
Abstract:In this article, a novel adaptive real-time iterative compensation (RIC) framework is proposed for ultraprecision motion control, contributing to the simultaneous achievement of extreme tracking accuracy, great trajectory generalization, strong disturbance rejection ability, and effective parametric adaption. The adaptive RIC controller basically incorporates a robust feedback term with an adaptive feedforward term to stabilize the closed-loop control system and adapt to model parameter variations. To further suppress potential residual errors caused by imperfect modeling and accidental external disturbances, in this framework, an extra position-loop feedforward compensation signal is designed to modify the desired reference trajectory during real-time motion using online prediction and compensation mechanism. Various motion tasks are implemented on an ultraprecision air-bearing motion stage. The proposed adaptive RIC achieves the same 7-nm-level extreme tracking accuracy as well-acknowledged iterative learning control methods while significantly outperforming them under variable working conditions involving trajectory alterations, parameter variations, and disturbance injections.
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