Abstract:3D printing of metals with high geometric freedom and sub‐10 μm resolution as well as great structure fidelity is achieved through an embedded‐writing embedded‐sintering method. Various micro‐scale silver architectures such as micro‐spring arrays, lattices, horn antenna, and rotatable windmills with moving parts are demonstrated. This method provides pathways toward the fabrication of 3D microelectromechanical systems with complex geometries. The ability to manufacture 3D metallic architectures with microscale resolution is greatly pursued because of their diverse applications in microelectromechanical systems (MEMS) including microelectronics, mechanical metamaterials, and biomedical devices. However, the well‐developed photolithography and emerging metal additive manufacturing technologies have limited abilities in manufacturing micro‐scaled metallic structures with freeform 3D geometries. Here, for the first time, the high‐fidelity fabrication of arbitrary metallic motifs with sub‐10 μm resolution is achieved by employing an embedded‐writing embedded‐sintering (EWES) process. A paraffin wax‐based supporting matrix with high thermal stability is developed, which permits the printed silver nanoparticle ink to be pre‐sintered at 175 °C to form metallic green bodies. Via carefully regulating the matrix components, the printing resolution is tuned down to ≈7 μm. The green bodies are then embedded in a supporting salt bath and further sintered to realize freeform 3D silver motifs with great structure fidelity. 3D printing of various micro‐scaled silver architectures is demonstrated such as micro‐spring arrays, BCC lattices, horn antenna, and rotatable windmills. This method can be extended to the high‐fidelity 3D printing of other metals and metal oxides which require high‐temperature sintering, providing the pathways toward the design and fabrication of 3D MEMS with complex geometries and functions.

3D Nanoprinting of Heterogeneous Metal Oxides with High Shape Fidelity.

3D Nanoprinting of Heterogenous Metal Oxides with High Shape Fidelity

Ultra-high Precision Nano Additive Manufacturing of Metal Oxide Semiconductors Via Multi-Photon Lithography

3D Printing Nano‐Architected Semiconductors Based on Versatile and Customizable Metal‐Bound Composite Photoresins

Colloidal Nanosurfactants for 3D Conformal Printing of 2D Van Der Waals Materials.

Additive Manufacturing of 3D-Architected Multifunctional Metal Oxides

Metal 3D nanoprinting with coupled fields

Synthesis, Morphology Control, and Properties of Porous Metal–organic Coordination Polymers

Free-space direct nanoscale 3D printing of metals and alloys enabled by two-photon decomposition and ultrafast optical trapping

A Generalized Polymer Precursor Ink Design for 3D Printing of Functional Metal Oxides

A 3D Self-Shaping Strategy for Nanoresolution Multicomponent Architectures

3D printing of inorganic nanomaterials by photochemically bonding colloidal nanocrystals

Compatible Hybrid 3D Printing of Metal and Nonmetal Inks for Direct Manufacture of End Functional Devices

Precursor-Based ZnO Nano Inks for Printed Electronics**Research supported by a Zhejiang Provincial Natural Science Foundation of China (No. LQ21F010003 to H.D), a China Postdoctoral Science Foundation (No. 2020M681952 to H.D) and Youth Science Fund Project of Zhejiang Lab (No. 2020MCOAA04 to H.D)

Liquid Metals‐Assisted Synthesis of Scalable 2D Nanomaterials: Prospective Sediment Inks for Screen‐Printed Energy Storage Applications

Meniscus-Guided 3D Microprinting of Pure Metal–Organic Frameworks with High Gas-Uptake Performance

3D Printing of Metals with sub‐10 μm Resolution

Direct ink writing of Ni structures for electrocatalytic water splitting applications

3D printing of metallic structures using dopamine-integrated photopolymer

Improving the Lithography Sensitivity of Atomically Precise Tin‐Oxo Nanoclusters via Heterometal Strategy

Integration of Surface Modified Aqueous Ink for Multi-Functional Material Extrusion