Suppression of the Regrowth Interface Leakage Current in AlGaN/GaN HEMTs by Fe Doped GaN Substrate

Xiao Wang,Zhi-Yu Lin,Yuan-Hang Sun,Long Yue,Yu-Min Zhang,Jian-Feng Wang,Ke Xu
DOI: https://doi.org/10.1007/s11432-024-4003-y
2024-01-01
Science China Information Sciences
Abstract:In the process of homoepitaxy AlGaN/GaN heterojunction by metal-organic chemical vapor deposition(MOCVD)on free-standing substrates,Si impurities from the air and re-action chamber accumulate at the regrowth interface[1],forming a leakage path in the AlGaN/GaN high electron mobility transistor(HEMT)[2].In this study,we quantified the leakage current at the regrowth interface,compensated the interfacial n-type leakage channel by Fe impurities,and subsequently introduced a Fe-stopper to inhibit Fe diffusion to improve the device output current.
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