Abstract:Femtosecond laser processing technology is an advanced sub-micro-processing technique that enables the non-contact processing of various materials. This technology can be used to apply sub-micro structures for purposes such as hydrophilicity enhancement, optical transmittance improvement, and photonics detection. However, when it comes to processing micro/nanostructures on highly brittle materials using femtosecond lasers, there are challenges such as low processing efficiency, generation of debris, and microcracking. In this paper, we propose a method called the out-of-focus femtosecond laser direct writing technique combined with wet etching. This method offers simplicity, speed, and flexibility in preparing dense, large-area sub-microstructured surfaces on the brittle material sapphire. Our detailed investigation focuses on the impact of laser processing parameters (direct writing period, distance of focusing, direct writing speed, etc.) on the sub-microstructures of Al2O3 surfaces. The results demonstrate that this method successfully creates embedded sub-microstructures on the sapphire surface. The microholes, with a diameter of approximately 2.0 μm, contain sub-micro structures with a minimum width of 250 ± 20 nm. Additionally, we conducted experiments to assess the optical transmittance of sapphire nanostructures in the range of 350–1200 nm, which exhibited an average transmittance of approximately 77.0%. The water contact angle (CA) test yielded a result of 52 ± 2°, indicating an enhancement in the hydrophilicity of the sapphire nanostructures with only a slight reduction in optical transmittance. Our efficient fabrication of sub-microstructures on the sapphire surface of highly brittle materials offers a promising method for the production and application of brittle materials in the field of micro-optics.

High Roundness and Cross-Scale Capillary Fabrication on Sapphire by Femtosecond Laser Ablation

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing

Scalable Shape-Controlled Fabrication of Curved Microstructures Using a Femtosecond Laser Wet-Etching Process

Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation

Fabrication of through sapphire vias by femtosecond laser bidirectional drilling

Laser micro-structuring of sapphire wafer and fiber

Femtosecond Laser Micro-Machining of Three-Dimensional Surface Profiles on Flat Single Crystal Sapphire

Note: femtosecond laser micromachining of straight and linearly tapered capillary discharge waveguides.

Femtosecond Laser Nano-Fabrication With Extended Processing Range

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Investigation on sapphire ablation by femtosecond-nanosecond dual beam laser

Free‐Form Micro‐Optics out of Crystals: Femtosecond Laser 3D Sculpturing

Laser-Induced Cavitation-Assisted True 3D Nano-Sculpturing of Hard Materials

Laser-Induced Bubble Dynamics Optimization for High-Aspect-Ratio 3D Micro-Fluidic Channels Fabrication

Experimental Investigation on the Scribing of Sapphire Using Uv Laser

Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array.

Rapid Fabrication of High-Resolution Multi-Scale Microfluidic Devices Based on the Scanning of Patterned Femtosecond Laser.

Fabrication of Microchannels on Silica Glass by Femtosecond Laser Multi-Scan： from Surface Generation Mechanism to Morphology Control