Prototypes of Potentiometric SO2 Gas Sensors Based on Li3PO4 Electrolyte Thin Film
Wang Hairong,Liu Zhen,Chen Di
DOI: https://doi.org/10.1109/icemi.2015.7494423
2015-01-01
Abstract:To build potentiometric SO 2 gas sensors based on Li 3 PO 4 electrolyte thin film, prototypes with different structures and electrode materials are investigated. The structures of the SO 2 sensors can be described as followings, O2, SO2, Au, Li2SO4-V 2 O 5 /Li 3 PO 4 /Li2TiO3-TiO 2 , Au, SO 2 , O 2 with 600 °C thermal treatment temperature of RE (reference electrode) and 500 °C thermal treatment temperature of WE (working electrode); O 2 , SO 2 , Au, Li2SO4-V 2 O 5 /Li 3 PO 4 , Au, SO 2 , O 2 with 500 °C thermal treatment temperature of WE; O 2 , SO 2 , Au, Li2SO4-V 2 O 5 / Li 3 PO 4 / Au, SO 2 , O 2 with 520 °C thermal treatment temperature of WE. The testing results indicate their properties and the most satisfactory one is O 2 , SO 2 , Au, Li2SO4-V 2 O 5 / Li 3 PO 4 /Au, SO 2 , O 2 with 500 °C thermal treatment temperature of WE. The ideal working temperature is about 480–500 °C, the measurement range is 0–100 ppm, the sensitivity is about 32.5 mV/dec, the response and the recovery time is about 5 min and 10 min, respectively. The work in this paper offer useful guidance to future research.