Abstract:MEMS accelerometers are widely employed in the Internet of Things (IoT) era. Among them, capacitive types are commonly used due to their low cost and compatibility with the commercial CMOS fabrication lines. However, piezoelectric MEMS accelerometers have great research popularity attributed to their wide working range, self-generating property and removal of the need for vacuum sealing. This study designs, fabricates and analyzes a piezoelectriccantilever- beam-based accelerometer in meso scale, which is constructed by a tungsten proof mass and a composite beam comprising of PZT and stainless steel layers. Four structures with different geometries/dimensions are designed for comparison, including rectangular and trapezoid beam shapes. All the devices are fabricated by MEMS processes where aerosol deposition is utilized to make high-quality PZT sensing layer. And the implementation of stainless steel substrate makes the fabrication flow simple and cost-effective. Experiments show that the natural frequencies of the four structures range from 572.25 Hz to 769.01 Hz, corresponding to respective working frequency range from 110 Hz to 150 Hz. The low frequency limit of 10 Hz is determined by a tailor-designed charge amplifier, which is used to amplify the output charge signal of the developed sensor. At the working frequency of 95 Hz, charge sensitivities of 23.9 pC/g to 41.4 pC/g are measured for the four structures. Comparison with other studies, the designed devices have high sensitivities.

Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Fabrication and Characterization of a MEMS Thermal Convective Accelerometer on Silicon-in-Glass Substrate

Design and Fabrication of a Micro-Electromechanical System Sandwich Capacitive Accelerometer

An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement

A Bulk Micromachined Si-on-Glass Tunneling Accelerometer

Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode

Design and Fabrication of a Mems Capacitive Accelerometer Based on Double-Device-layers SOI Wafer.

Fabrication of a MEMS Capacitive Accelerometer with Symmetrical Double-Sided Serpentine Beam-Mass Structure

A micromachined silicon resonant accelerometer

A Bulk Micromachined Si-on-glass Tunneling Accelerometer with Out-of-plane Sensing Capability

A high sensitivity piezoelectric MEMS accelerometer based on aerosol deposition method

Design and Fabrication of MEMS Acceleration Sensor for Device-Level Vacuum Packaging

An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

Design, Manufacture And Test Of Novel Mems Piezoresistive Accelerometer For High G Application

A MEMS-Based Electrochemical Angular Accelerometer With Integrated Plane Electrodes for Seismic Motion Monitoring

A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material

A MEMS Sandwich Differential Capacitive Silicon-on-insulator Accelerometer

A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

A novel out-of-plane MEMS tunneling accelerometer