Investigation on Transportation Mechanisms of InSnO/ZnO Heterojunction Transistors

Chuanlin Sun,Jingye Xie,Shuhan Wang,Kai Zhao,Junchen Dong,Zheng Zhou,Dedong Han,Xing Zhang
DOI: https://doi.org/10.1109/EDTM58488.2024.10511612
2024-01-01
Abstract:We fabricate the InSnO/ZnO (ITO/ZnO) heterojunction transistors and single-channel ITO, ZnO transistors, and investigate transportation mechanisms of the ITO/ZnO heterojunction transistors by technology computer aided design (TCAD) simulation. A quasi-two-dimensional electron gas is formed at the ITO/ZnO heterojunction interface. Thus, current conduction paths are configured at both the ITO/ZnO heterojunction interface and the gate dielectric/ITO interface, resulting in higher on-state current of the ITO/ZnO heterojunction transistors than that of single-channel ITO or ZnO transistors.
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