The Interfacial Defects Characteristic and Low-Temperature Electrical Properties of the Germanium Oxynitride Passivation Film for Ge- Based Mos Device and High Purity Germanium Detectors

Shengjie Du,Xiuxia Li,Menglin Qiu,Yaohui Zhu,Weiyou Tang,Zhi Deng,Yang Tian,Yulan Li,Ke Jia,Zhengcao Li,Jianping Cheng,Shasha Lv
DOI: https://doi.org/10.2139/ssrn.4813298
2024-01-01
Abstract:Germanium-based devices with high electron/hole mobility at low temperature have extensive application value in the detection field. Among them, high purity germanium (HPGe) detectors are a kind of γ-ray detector with the highest energy resolution. The germanium passivation is the bottleneck restricting the development of germanium-based devices. In this article, we study the mechanism of germanium oxynitride (GeOxNy) passivation layer to realize low surface defects of Ge-based devices and HPGe detector. To establish the optimal experimental conditions and passivation mechanism, GeOxNy films were prepared by magnetron sputtering in different O2/N2 ratios. Then, the surface defects of Ge/GeOxNy is analyzed by constructing Al/GeOxNy/Ge MOS devices. Their electrical characteristics were tested at room temperature and 77K. The interface state density (Dit) reflected the surface defects with passivation. The border traps between the GeOxNy/Ge surface were the most important factor causing the Dit to increase at 77K. The highest minority lifetime of 16.588 μs shows that GeOxNy film can effectively reduce interface defects. The leakage current and energy resolution of HPGe detector were further tested after GeOxNy passivation, which achieved a relatively higher energy resolution. This exploration of GeOxNy films gives potential applications for the surface modification of Ge-MOS devices and HPGe detectors.
What problem does this paper attempt to address?