On-Wafer Measurement of CPW with RDL Process for Substrate Effect in <i>W</i>-Band

Chenhong Sun,Liguo Sun,Fujiang Lin
DOI: https://doi.org/10.1109/APMC57107.2023.10439909
2023-01-01
Abstract:This study aims to analyze the substrate effect of coplanar waveguide (CPW) with redistribution layer (RDL) process based on the On-Wafer measurement on the probe station chuck in w-band. The findings reveal that the substrates semiconductor properties and thickness can lead to the occurrence of an abrupt resonance cavity in transmission. Additionally, a novel equivalent circuit model is proposed to effectively describe the resonance cavity, with the frequency range from 110 MHz to 110 GHz. Moreover, the study demonstrates that utilizing On-Wafer measurement of CPW with absorbing material can effectively eliminate resonances, thus enhancing the accuracy of S-parameters measurement. This work can contribute to precise semiconductor device measurements in the millimeter-wave frequency range.
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