Abstract:OBJECTIVE: Foreign body response to indwelling cortical microelectrodes limits the reliability of neural stimulation and recording, particularly for extended chronic applications in behaving animals. The extent to which this response compromises the chronic stability of neural devices depends on many factors including the materials used in the electrode construction, the size, and geometry of the indwelling structure. Here, we report on the development of microelectrode arrays (MEAs) based on amorphous silicon carbide (a-SiC).APPROACH: This technology utilizes a-SiC for its chronic stability and employs semiconductor manufacturing processes to create MEAs with small shank dimensions. The a-SiC films were deposited by plasma enhanced chemical vapor deposition and patterned by thin-film photolithographic techniques. To improve stimulation and recording capabilities with small contact areas, we investigated low impedance coatings on the electrode sites. The assembled devices were characterized in phosphate buffered saline for their electrochemical properties.MAIN RESULTS: MEAs utilizing a-SiC as both the primary structural element and encapsulation were fabricated successfully. These a-SiC MEAs had 16 penetrating shanks. Each shank has a cross-sectional area less than 60 µm2 and electrode sites with a geometric surface area varying from 20 to 200 µm2. Electrode coatings of TiN and SIROF reduced 1 kHz electrode impedance to less than 100 kΩ from ~2.8 MΩ for 100 µm2 Au electrode sites and increased the charge injection capacities to values greater than 3 mC cm-2. Finally, we demonstrated functionality by recording neural activity from basal ganglia nucleus of Zebra Finches and motor cortex of rat.SIGNIFICANCE: The a-SiC MEAs provide a significant advancement in the development of microelectrodes that over the years has relied on silicon platforms for device manufacture. These flexible a-SiC MEAs have the potential for decreased tissue damage and reduced foreign body response. The technique is promising and has potential for clinical translation and large scale manufacturing.

Diamond-Like-Carbon Coated Ultramicroelectrode with Contrallable Exposed Length Based on Microplasma Jet

Controllable Tip Exposure of Ultramicroelectrodes Coated by Diamond-Like Carbon Via Direct Microplasma Jet for Enhanced Stability and Fidelity in Single-Cell Recording

Development of Disk Ultramicroelectrodes Based on Low Melting or Softening Point Metal Fibers by Low Temperature Plasma Enhanced Chemical Vapor Deposition

Diamond Ultramicroelectrodes

High-Performance 3D Platinum Nanostructure Coating on fMEA for Neural Stimulation/Recording

Multichannel boron doped nanocrystalline diamond ultramicroelectrode arrays: design, fabrication and characterization

Ultra‐Soft Neural Probe with a Temporary High‐Strength U‐Section Coating by Picosecond Laser Micromachining

A PDMS-Based Conical-Well Microelectrode Array for Surface Stimulation and Recording of Neural Tissues

Fabrication of Ultramicroelectrodes Based on PECVD

Flexible Disk Ultramicroelectrode for High-Resolution and Substrate-Tolerable Scanning Electrochemical Microscopy Imaging

Focused Ion Beam Fabrication of Boron-Doped Diamond Ultramicroelectrodes.

Ultrathin Cell-Membrane-Mimic Phosphorylcholine Polymer Film Coating Enables Large Improvements for In Vivo Electrochemical Detection.

Surface functionalization and shape tuning of carbon fiber monofilament via direct microplasma scanning for ultramicroelectrode application

Fabrication and Characterisation of Diamond Ultramicroelectrodes of Diameter < 25 Microns for Use in Electroanalysis, Sensing and Imaging Applications

Fabrication of Boron-Doped Diamond Ultramicroelectrodes for Use in Scanning Electrochemical Microscopy Experiments

Wafer-patterned, permeable, and stretchable liquid metal microelectrodes for implantable bioelectronics with chronic biocompatibility

Preparation And Characterization Of Nm-Sized Electrochemical Sensors

(Invited) Modulate the Surface of Microelectrode for In Vivo Analysis

Amorphous silicon carbide ultramicroelectrode arrays for neural stimulation and recording

Direct And All-Dry Microfabrication Of Ultramicroelectrode Based On Cold Atmospheric Microplasma Jet

Hybrid Diamond/ Carbon Fiber Microelectrodes Enable Multimodal Electrical/chemical Neural Interfacing.