Local Surface Plasmon Enhancement of (gain)2o3 Based Ultraviolet Photodetector

Fabi Zhang,Chenghao Weng,Haiou Li,Xinpeng Liu,Tangyou Sun

DOI: https://doi.org/10.1109/csrswtc60855.2023.10427250

2023-01-01

Abstract:This article proposes an effective method to enhance the performance of (GaIn) 2 O 3 thin film photodetectors through localized surface plasmon resonance technology. To realize that, a thin layer of Ag metal is deposited on top of the (GaIn)2O3 thin film and a rapid annealing process is followed to form dispersed metal particles. It has been verified that this method can enhance the absorption of ultraviolet light of the thin film. The dark current decreases the and the light response and detection rate has been enhanced. Under the conditions of a 254 nm wavelength ultraviolet lamp and a bias voltage of 12 V, the light response of the device is 22.2 mA/W, and the detection rate of the device reaches $\boldsymbol{3.58}\times \boldsymbol{10^{12}}\mathbf{cm} \cdot \mathbf{Hz}^{\boldsymbol{1/2}}\cdot \mathbf{W}^{\boldsymbol{-1}}$ .