ChemInform Abstract: Germanium Thin Film Formation by Low‐Pressure Chemical Vapor Deposition.

Zhiguo Meng,Zhonghe Jin,Bhat A. Gururaj,Paul K. Chu,Hoi Sing Kwok,Man Wong
DOI: https://doi.org/10.1002/chin.199732012
1997-01-01
ChemInform
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