Experimental Design of Preparation,Lithography and Measurement for ITO Thin-film

Le Zhang
2013-01-01
Abstract:Experimental design of display technology of UESTC is analyzed in this paper.This experiment mainly relates to the preparation of ITO thin film,the pattern etching,the square resistance test and the transmittance test of ITO film.Through the experiment,the students can master the preparation of ITO thin film,the formation of thin film pattern,the film performance testing and other basic technology.
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