Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Correction: Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis

Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis

monolithically integrated into 3 D glass micro fl uidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis †

Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing.

Author Correction: Ultra-thin high-efficiency mid-infraredtransmissive Huygens meta-optics

Erratum: 3D Printing Fiber Electrodes for an All-Fiber Integrated Electronic Device Via Hybridization of an Asymmetric Supercapacitor and a Temperature Sensor.

Corrections to “zinc Oxide Nanostructures and High Electron Mobility Nanocomposite Thin Film Transistors” [nov 08 3001-3011

Correction: DLP printing of a flexible micropattern Si/PEDOT:PSS/PEG electrode for lithium-ion batteries

Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser

Correction: Three-dimensional Numerical Simulation and Experimental Investigation of Boundary-Driven Streaming in Surface Acoustic Wave Microfluidics

Optofluidic Microlenses: All‐Glass 3D Optofluidic Microchip with Built‐in Tunable Microlens Fabricated by Femtosecond Laser‐Assisted Etching (advanced Optical Materials 9/2018)

Erratum to “Femtosecond Laser Direct Ablating Micro/Nanostructures and Micropatterns on CH3NH3PbI3 Single Crystal”

Correction: Ultrahigh thermal conductive polymer composites by the 3D printing induced vertical alignment of carbon fiber

Correction: High performance, binder-free electrodes with single atom catalysts on doped nanocarbons for electrochemical water splitting synthesized using one-step thermally controlled delamination of thin films

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array: erratum

Correction: Exfoliation of Amorphous Phthalocyanine Conjugated Polymers into Ultrathin Nanosheets for Highly Efficient Oxygen Reduction

Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method

Correction: A self-healing, recyclable and conductive gelatin/nanofibrillated cellulose/Fe3+ hydrogel based on multi-dynamic interactions for a multifunctional strain sensor

Correction: An ultrasound-induced MXene doped PAM–SA super-tough hydrogel

Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass