Abstract:Photonic integrated circuits are indispensible for data transmission within modern datacenters and pervade into multiple application spheres traditionally limited for bulk optics, such as LiDAR and biosensing. Of particular interest are ferroelectrics such as Lithium Niobate, which exhibit a large electro-optical Pockels effect enabling ultrafast and efficient modulation, but are difficult to process via dry etching . For this reason, etching tightly confining waveguides - routinely achieved in silicon or silicon nitride - has not been possible. Diamond-like carbon (DLC) was discovered in the 1950s and is a material that exhibits an amorphous phase, excellent hardness, and the ability to be deposited in nano-metric thin films. It has excellent thermal, mechanical, and electrical properties, making it an ideal protective coating. Here we demonstrate that DLC is also a superior material for the manufacturing of next-generation photonic integrated circuits based on ferroelectrics, specifically Lithium Niobate on insulator (LNOI). Using DLC as a hard mask, we demonstrate the fabrication of deeply etched, tightly confining, low loss photonic integrated circuits with losses as low as 5.6 dB/m. In contrast to widely employed ridge waveguides, this approach benefits from a more than 1 order of magnitude higher area integration density while maintaining efficient electro-optical modulation, low loss, and offering a route for efficient optical fiber interfaces. As a proof of concept, we demonstrate a frequency agile hybrid integrated III-V Lithium Niobate based laser with kHz linewidth and tuning rate of 0.7 Peta-Hertz per second with excellent linearity and CMOS-compatible driving voltage. Our approach can herald a new generation of tightly confining ferroelectric photonic integrated circuits.

Fabry-Perot Cavity Filter Based on Lithium Niobate

Photonic Filters on the Lithium-Niobate-on-insulator with Ultra-High Sidelobe Suppression Ratio

Photorefractive Long-Period Waveguide Grating Filter in Lithium Niobate Strip Waveguide

An Optical Filter Based on Sidewall Long-Period Grating in Lithium Niobate on Insulator

High-performance lithium-niobate-on-insulator optical filter based on multimode waveguide gratings

Compact Optical Mode and Polarization Filtering Devices Based on Subwavelength Gratings on a Lithium Niobate on Insulator Platform

Lithium–Niobate Channel Waveguide for the Realization of Long-Period Gratings

Fano-Resonant Metasurface with 92% Reflectivity Based on Lithium Niobate on Insulator

Cavity-enhanced narrowband spectral filters using rare-earth ions doped in thin-film lithium niobate

Grating-Assisted Directional Coupler in Lithium Niobate for Tunable Mode Filtering

Thermo-optic tunable optical filters with GHz-bandwidth and flat-top passband on thin film lithium niobate platform.

Tunable Broadband Filter Based on Lithium-Niobate Asymmetric Mach–Zehnder Interferometer for Coarse Wavelength-Division Multiplexing Applications

An electrically controlled tunable photonic crystal filter based on thin-film lithium niobate

Silicon and Silicon Nitride Based Bilayer Polarization-insensitive Optical Filter

Lithium Niobate Piezoelectric Actuator-Integrated Fiber Fabry-Pérot Tunable Filter with Ultrahigh Speed and Linearity

Cryogenic Lithium-Niobate-on-insulator Optical Filter

Tunable ultra-narrowband grating filters in thin-film lithium niobate

High density lithium niobate photonic integrated circuits

Tightly confining lithium niobate photonic integrated circuits and lasers

High-Frequency and High-Linearity Lithium Niobate Electro-optic Modulator

First Realization of a Three-Channel Lithium-Niobate Photonic Filter for 50G Passive Optical Networks