Abstract:Photonic integrated circuits are indispensible for data transmission within modern datacenters and pervade into multiple application spheres traditionally limited for bulk optics, such as LiDAR and biosensing. Of particular interest are ferroelectrics such as Lithium Niobate, which exhibit a large electro-optical Pockels effect enabling ultrafast and efficient modulation, but are difficult to process via dry etching . For this reason, etching tightly confining waveguides - routinely achieved in silicon or silicon nitride - has not been possible. Diamond-like carbon (DLC) was discovered in the 1950s and is a material that exhibits an amorphous phase, excellent hardness, and the ability to be deposited in nano-metric thin films. It has excellent thermal, mechanical, and electrical properties, making it an ideal protective coating. Here we demonstrate that DLC is also a superior material for the manufacturing of next-generation photonic integrated circuits based on ferroelectrics, specifically Lithium Niobate on insulator (LNOI). Using DLC as a hard mask, we demonstrate the fabrication of deeply etched, tightly confining, low loss photonic integrated circuits with losses as low as 5.6 dB/m. In contrast to widely employed ridge waveguides, this approach benefits from a more than 1 order of magnitude higher area integration density while maintaining efficient electro-optical modulation, low loss, and offering a route for efficient optical fiber interfaces. As a proof of concept, we demonstrate a frequency agile hybrid integrated III-V Lithium Niobate based laser with kHz linewidth and tuning rate of 0.7 Peta-Hertz per second with excellent linearity and CMOS-compatible driving voltage. Our approach can herald a new generation of tightly confining ferroelectric photonic integrated circuits.

Fabrication of 100-Nm-period Domain Structure in Lithium Niobate on Insulator

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Tip-induced nanoscale domain engineering in x-cut lithium niobate on insulator

Graphical Direct-Writing of Macroscale Domain Structures with Nanoscale Spatial Resolution in Non-Polar-Cut Lithium Niobate on Insulators

Fabrication of Pattern Poled Lithium Niobate Film and Its Nonlinear Optical Applications

Femtosecond-laser-assisted high-aspect-ratio nanolithography in lithium niobate

Tightly confining lithium niobate photonic integrated circuits and lasers

Ferroelectric domain inversion and its stability in lithium niobate thin film on insulator with different thicknesses

Wafer-Scale Periodic Poling of Thin-Film Lithium Niobate

Femtosecond laser writing of lithium niobate ferroelectric nanodomains

Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness

Low-loss Lithium Niobate on Insulator (LNOI) Waveguides of a 10 cm-length and a Sub-nanometer Surface Roughness

High density lithium niobate photonic integrated circuits

Recent development in integrated Lithium niobate photonics

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Lithium niobate micro-disk resonators of quality factors above 10^7

Resonant Nonlinear Nanostructured Grating in an Unstructured Lithium Niobate on Insulator Platform

Advancements in Ultrafast-Laser-Inducing Micro-Nanophotonic Structures Inside Lithium Niobate(Invited)