Laser-driven Hierarchical "Gas-Needles" for Programmable and High-Precision Proximity Transfer Printing of Microchips.

Furong Chen,Mengxin Gai,Ningning Sun,Zhangyu Xu,Lei Liu,Haiyang Yu,Jing Bian,Yongan Huang
DOI: https://doi.org/10.1126/sciadv.adk0244
IF: 13.6
2023-01-01
Science Advances
Abstract:Micro–transfer printing (μTP) techniques are essential for advanced electronics. However, current contact/noncontact μTP techniques fail to simultaneously achieve high selectivity and transfer accuracy. Here, a laser projection proximity transfer (LaserPPT) technique is presented, which assembles the microchips in an approach-and-release manner, combining high-precision parallelism with individual chip control. An embedded carbon layer with a thin gas layer is generated by an ultraviolet laser, followed by absorbing heat from the infrared laser, to enable the sequential expansion of hierarchical “gas-needles.” The level 1 large gas-needle with a substantially growing height can reduce the gap between the microchip and the receiver. Then, the level 2 small gas-needles enable the gentle release of a chip. Therefore, the LaserPPT can obtain a strong adhesion modulation (~1000 times), excellent size scalability (<100 micrometers), and high transfer accuracy of ~4 micrometers. Last, the assembly of a micro–light-emitting diode display demonstrates the capabilities for deterministic assembly of microarrays.
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