Abstract:Capacitive micromechanical ultrasonic transducers (CMUTs) have widespread applications in ultrasonic imaging, therapeutic treatment, and underwater applications. Reasonable design of their array structures essentially determines the performance in aforementioned applications. However, there is a lack of a systematic investigation on the design strategies and effects of structure parameters of CMUTs arrays, significantly impeding their performance improvement. This article constructs explicit and accurate analytical expressions for the main performances of CMUTs arrays in immersion by introducing the accurate distributed membrane deflection. Based on these theories, the influence laws of the aforementioned structure parameters on the CMUTs array performances are analyzed and summarized in detail, including the transmitting power, receiving sensitivity, focal length, beamwidth, and so on. These theories and array performance variation rules are well validated by finite element method (FEM) simulations and experiment results of our fabricated CMUTs chips. It is demonstrated by the FEM simulation that, under specific array structural parameters, the fill factor has a significant improvement effect on CMUTs bandwidth (up to 173%). The multiarm spiral array and ring-shape array reduce the sidelobe level (62% less than that of conventional square arrays) and improve the transmitting power and receiving sensitivity (35% and 33% larger than those of conventional circular arrays), respectively. Based on these, CMUTs array design and optimization strategies are provided for typical ultrasonic applications. This study provides a theoretical basis for the design and application of CMUTs arrays in immersion, which will accelerate the development of CMUTs devices.

Round-Trip Sensitivity-Bandwidth Optimization and Characterization of High-Frequency PMUTs

Sensitivity—Bandwidth Optimization of PMUT with Acoustical Matching Using Finite Element Method

Design and Modeling of a Dual-Driving PMUT with Increased Round-Trip Sensitivity

Performance and Crosstalk Evaluation of 2-D Array Piezoelectric Micromachined Ultrasonic Transducer with 3-D Finite Element Simulation

Multi-frequency Broadband Piezoelectric Micromachined Ultrasonic Transducer Utilizing Helmholtz Resonance

Enhancement of the Transmission Performance of Piezoelectric Micromachined Ultrasound Transducers by Vibration Mode Optimization

Analysis, modeling and design of piezoelectric-capacitive hybrid micromachined ultrasonic transducer

Investigation of performance dependence on transduction diaphragm design for piezoelectric micromachined ultrasonic transducers

Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity

Feasible Optimization and Fabrication of Multi-dimension Composites for High Frequency Ultrasonic Transducer

Effect of Shared Cavity on Electromechanical Performance of Piezoelectric Based Micro-machined Ultrasonic Transducer Array.

Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications

Optimization of capacitive micromachined ultrasound transducers (CMUTs) for a high-frequency medical ultrasonic imaging system

Multi-mode coupled vibration analysis and radiation sound field investigation of a novel multidirectional piezoelectric ultrasonic transducer

3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI

Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers Via Beam-Membrane Coupled Structure

Modeling and Optimization of CMUTs Arrays for Improved Transmission and Reception Performance in Immersion

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films

Research and Fabrication of High-Frequency Broadband and Omnidirectional Transmitting Transducer