Modulated temperature sensitivity based on silicon ring resonators with titanium dioxide cladding

Minmin You,Zhu Xiantao,Jingquan Liu
2023-01-01
Abstract:We investigated the temperature dependence of silicon ring resonators deposited TiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> cladding. It was experimentally demonstrated that temperature sensitivity can be greatly modulated from 7.68 pm/K to 51.95 pm/K by varying width of waveguide from 330 nm to 390 nm.
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