Research on High-Precision Capacitive Automatic Measuring System for Pinhole Diameter

Xin Feng
2009-01-01
Abstract:A high-precision,non-contact capacitance measuring method for pinhole diameter is introduced,and a special probe is designed.An automatic measuring system for pinhole diameter is formed.The system uses vision CCD and a two-dimensional micro-adjusting instrument to achieve precise position.The software is completed with VC++6.0,which can control to run automatically and compelete experimental data acquisition,calibration and data processsing.Experiments show that the resolution of this system is 0.5 μm and the standard deviation is 0.81 μm.
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