Abstract:Micromechanical transducers such as cantilevers for AFM often rely on optical readout methods that require illumination of a specific region of the microstructure. Here we explore and exploit the diffraction effects that have been previously neglected when modeling cantilever bending measurement techniques. The illumination of a cantilever end causes an asymmetric diffraction pattern at the photodetector that significantly affects the calibration of the signal in the popular optical beam deflection technique (OBDT). Conditions for optimized linear signals that avoid detection artifacts conflict with small numerical aperture illumination and narrow cantilevers which are softer and therefore more sensitive. Embracing diffraction patterns as a physical measurable allows a richer detection technique that decouples measurements of tilt and curvature and simultaneously relaxes the requirements on the alignment of illumination and detector. We show analytical results, numerical simulations and physiologically relevant experimental data demonstrating the usefulness of these diffraction features. We offer experimental design guidelines and identify and quantify possible sources of systematic error of up to 10% in OBDT. We demonstrate a new nanometre resolution detection method that can replace OBDT, where Frauenhofer and Bragg diffraction effects from finite sized and patterned cantilevers are exploited. Such effects are readily generalized to arrays, and allow transmission detection of mechanical curvature, enabling in-line instruments. In particular, a cantilever with a periodic array of slots produces Bragg peaks which can be analyzed to deduce the cantilever curvature. We highlight the comparative advantages over OBDT by detecting molecular activity of antibiotic Vancomycin, with an RMS noise equivalent to less than $2.5 \mu M$ (1.5 nm), as example of possible multi-maker bio-assays.

&Lt;title>grating Diffraction for Strain Measurement in a Microscope</title>

Strain Microscope with Grating Diffraction Method

Optical Grating Diffraction Method: from Strain Microscope to Strain Gauge

Micro-Measurement Using Grating Microscopy

&Lt;title>diffraction Strain Sensor for Micromeasurements</title>

&Lt;title>simultaneous Strain and Displacement Measurements in Micromechanics</title>

Simultaneous Micro-Stress and Strain Measurement with an Optical Microscope

Optical strain sensor using median density grating foil: Rivaling the electric strain gauge

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

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Real-Time Plasmonic Strain Sensors Based on Surface Relief Diffraction Gratings

Surface Patterning for Multi-Scale Strain Analysis of In-Situ Sem Mechanical Experiments

Diffraction-Based Multiscale Residual Strain Measurements

Strain measurement based on fixed wavelength transmission of tapered long-period fiber grating

Simplified Laser-Speckle Strain Gauge

Absolute Strain Measurement Using an In-Fibre-Bragg-Grating-Based Fabry-Perot Sensor

Dual-Light-Path Optical Strain Gauge Using Diffraction Grating and Position-Sensitive Detectors for Deformation Measurement

Single-camera microscopic stereo digital image correlation using a diffraction grating

Strain Measurement Range Enhanced Chirped Pulse Φ-Otdr for Distributed Static and Dynamic Strain Measurement Based on Random Fiber Grating Array.

Optical diffraction for measurements of nano-mechanical bending

Measuring Interface Strains At The Atomic Resolution In Depth Using X-Ray Bragg-Surface Diffraction

&Lt;title&gt;grating Diffraction for Strain Measurement in a Microscope&lt;/title&gt;