Influence of nano-twins on {001} texture of L 1 0 -FePt thin films

Wei LI,Xuanli Wang

DOI: https://doi.org/10.1007/s00339-022-06173-w

2022-01-01

Applied Physics A

Abstract:L 1 0 -FePt thin film has been considered as a promising material for ultrahigh density perpendicular magnetic recording media. In this work, the L 1 0 –FePt thin films have been prepared by magnetron sputtering method on amorphous thermally oxidized SiO 2 substrates and annealed by rapid thermal annealing. The texture evolution of L 1 0 –FePt thin films have been investigated according to control the film thickness. The texture was quantitatively investigated by X-ray diffraction. The interface microstructure and nano-twins were characterized by electron back scatter diffraction and transmission electron microscopy. The experimental results indicated that film thickness has a strong influence on the strength of {001} texture in L 1 0 -FePt films. When the film thickness was 5 nm, the intensity of {001} texture was the strongest. As the film thickness exceeded 15 nm, nano-twins began to appear in the growth direction of L 1 0 -FePt film, which changed the grain growth direction. Twinning will deflect the grain growth direction, which is the main reason for the decrease of {001} texture.