Abstract:Chiral metamaterials (CMs) composed by artificial chiral resonators have attracted great attentions in the recent decades due to their strong chiroptical resonance and identifiable interaction with chiral materials, facilitating practical applications in chiral biosensing, chiral emission, and display technology. However, the complex geometry of CMs improves the fabrication difficulty and hinders their scalable fabrication for practical applications, especially in the visible and ultraviolet wavelengths. One potential strategy is the colloidal lithography that enables parallel fabrication for scalable and various planar structures. Here, we demonstrate a stepwise colloidal lithography technique that uses sequential deposition from multiple CMs and expand their variety and complexity. The geometry and optical chirality of building blocks from single deposition are systematically investigated, and their combination enables a significant extension of the range of chiral patterns by multiple-step depositions. This approach resulted in a myriad of complex designs with different characteristic sizes, compositions, and shapes, which are particularly beneficial for the development of nanophotonic materials. In addition, we designed a flexible chiral device based on PDMS, which exhibits a good CD value and excellent stability even after multiple inward and outward bendings. The excellent compatibility to various substrates makes the planar CMs more flexible in practical applications in microfluidic biosensing.

Fabrication of Planar Chiral Photonic Meta-Materials on SU- 8 Using Nanoimprint Lithography Technique

Metallic and Dielectric Photonic Crystals with Chiral Elements by Combined Nanoimprint and Reversal Lithography in SU-8

Optical Nanostructures Fabricated by Su-8 Based Nanoimprint Lithography

Nanophotonic Crystals with Chiral Elements by a Hot Embossing Process in SU-8

Nanoimprint Fabrication of Planar Photonic and Plasmonic Crystals

Stepwise colloidal lithography toward scalable and various planar chiral metamaterials

Development of Novel SU-8 Based Nanoimprint Lithography

Nanoimprint Meta‐Device for Chiral Imaging

Controlling the broadband enhanced light chirality with L-shaped dielectric metamaterials

The polarization modulation and fabrication method of two dimensional silica photonic crystals based on UV nanoimprint lithography and hot imprint

Solution Processing and Resist‐Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic–Organic Hybrid Photonic Integration

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Applications Of Nanoimprint Lithography For Biochemical And Nanophotonic Structures Using Su-8

Fabrication of 150 Nm Half-Pitch Grating Templates for Nanoimprint Lithography

Chiral Confined Unimolecular Micelles for Controlled In Situ Fabrication of Optically Active Hybrid Nanostructures

Tunable Chiral Optics in All-Solid-Phase Reconfigurable Dielectric Nanostructures

Hybrid bilayer plasmonic metasurfaces with intrinsic chiral optical responses

Planar chiral metasurfaces with maximal tunable chiroptical response driven by bound states in the continuum

Effective Polarization Control of Metallic Planar Chiral Metamaterials with Complementary Rosette Pattern Fabricated by Nanoimprint Lithography

Nanoimprint lithography for optic fluidics with phase gratings for environmental monitoring application

Tailoring chiral optical properties by femtosecond laser direct writing in silica