1.3Μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90Nm

Zuo Yuhuai,Huang Changjun,Bingying Cheng,Xinxia Cai,Ruifeng Mao,Chuanbo Li,Luo Liping,Gao Junhua,Yulong Bai,Lei Jiang,Chaohua Ma,Junjie Zhu,Liangchen Wang,Jinzhong Yu,Qiming Wang
2003-01-01
Abstract:Optical filters capable of single control parameter-based wide tuning are implemented and studied. A prototype surface micromachined 1.3μm Si-based MOEMS (micro-opto-electro-mechanical-systems) tunable filter exhibits a continuous and large tuning range of 90 nm at 50 V tuning voltage. The filter can be integrated with Si-based photodetector in a low-cost component for coarse wavelength division multiplexing systems operating in the 1.3μm band.
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