1.55-Μm Si-based MOEMS Optical Tunable Filter

左玉华,黄昌俊,成步文,蔡晓,毛容伟,李传波,罗丽萍,高俊华,白云霞,姜磊,马朝华,朱家廉,王良臣,余金中,王启明
IF: 2.56
2003-01-01
Chinese Optics Letters
Abstract:A prototype 1.55-μm Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices.
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