Metalorganic Chemical Vapor Deposition of GaAsN Epilayers: Microstructures and Optical Properties

Q. Gao,H.H. Tan,C. Jagadish,B.Q. Sun,M. Gal,L. Ouyang,J. Zou
DOI: https://doi.org/10.1016/j.jcrysgro.2003.12.068
IF: 1.8
2004-01-01
Journal of Crystal Growth
Abstract:In this article, we investigate the parameters used in the MOCVD growth of GaAsN epilayers on GaAs substrates and some of their microstructures and optical properties. The N incorporation was found to mainly depend on the growth temperature and the fractional 1,1-dimethylhydrazine molar flow. A thin highly strained interface layer was observed between GaAsN and GaAs, which, contrary to previously published results, was not N enriched. The low-temperature (10 K) photoluminescence spectra were composed of several emissions that we attribute to a combination of interband transition and transitions involving localized defect states.
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