Block Copolymer-assisted Carbon Nanotube Gas Sensor on SOI Substrate

Bao-Lin Zhang,Li,Ling-Kuan Meng,Jing-Wan,Shi-Sheng Xiong
DOI: https://doi.org/10.1109/icsict55466.2022.9963171
2022-01-01
Abstract:This paper demonstrates the fabrication of sensor with electrical and gas sensing characteristics formed by block copolymer (BCP)-assisted carbon nanotube (CNT) on a silicon-on-insulator (SOI). The maximum sensing current of the sensor device is 19.02 μA when V DS is at the optimal voltage of 30 V. Meanwhile, the gas sensor exhibits good gas sensing performance both in oxidizing gas NO 2 and reducing gas NH 3 , and high stability. In addition, the Schottky characteristic appeared when the back gate-voltage regulation is applied. The gas sensor of BCP-assisted CNT network not only successfully forms the controllable sensing film but also realizes effective utilization of the sensing area of CNTs during the device fabrication and characterization process.
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