TCF-Improved SH0 Mode Acoustic Resonators Based on 30°YX-LINBO3/SIO2 Membrane

Shuxian Wu,Zonglin Wu,Hangyu Qian,Feihong Bao,Gongbin Tang,Feng Xu,Jie Zou

DOI: https://doi.org/10.1109/mems49605.2023.10052518

2023-01-01

Abstract:In this paper, a 30° YX-Lithium Niobate (LN) 0-th shear horizontal (SH 0 ) plate acoustic wave (PAW) resonator is proposed. The SH 0 mode characteristics the superiority of interdigital transducer (IDT) in the frequency definition over most other plate modes. Using finite element analysis method, the rotation angle of LN and the thickness of each layer were optimized for large effective coupling coefficient $\left( {{k^2}_{{\text{eff}}}} \right)$ and high acoustic velocity. The rotation angle and the thickness of LN membrane are optimized as 30° and 0.2λ, respectively. To improve the temperature stability of proposed PAW resonators, a SiO 2 film are added and the thickness is designed as 0.2λ. The measurement results derived a ${k^2}_{{\text{eff}}}$ of 25.1%, a Bode-Q max of 604, and a Figure of merit (FoM) of 151, which is higher than the reported similar-type PAW resonators. The measured first-order temperature coefficients of frequency at resonant frequency (TCF fs ) and anti-resonant frequency (TCF fp ) are -38ppm/°C and -26ppm/°C, suggesting the temperature stability improvement in comparison with only LN membrane-based resonators.