Abstract:Resonant nanoelectromechanical systems (NEMS) based on two-dimensional (2D) materials such as molybdenum disulfide (MoS2) are interesting for highly sensitive mass, force, photon, or inertial transducers, as well as for fundamental research approaching the quantum limit, by leveraging the mechanical degree of freedom in these atomically thin materials. For these mechanical resonators, the quality factor (Q) is essential, yet the mechanism and tuning methods for energy dissipation in 2D NEMS resonators have not been fully explored. Here, we demonstrate that by tuning static strain and vibration-induced strain in suspended MoS2 using gate voltages, we can effectively tune the Q in 2D MoS2 NEMS resonators. We further show that for doubly clamped resonators, the Q increases with larger DC gate voltage, while fully clamped drumhead resonators show the opposite trend. Using DC gate voltages, we can tune the Q by ΔQ/Q = 448% for fully clamped resonators, and by ΔQ/Q = 369% for doubly clamped resonators. We develop the strain-modulated dissipation model for these 2D NEMS resonators, which is verified against our measurement data for 8 fully clamped resonators and 7 doubly clamped resonators. We find that static tensile strain decreases dissipation while vibration-induced strain increases dissipation, and the actual dependence of Q on DC gate voltage depends on the competition between these two effects, which is related to the device boundary condition. Such strain dependence of Q is useful for optimizing the resonance linewidth in 2D NEMS resonators toward low-power, ultrasensitive, and frequency-selective devices for sensing and signal processing.

LARGE-SCALE ARRAYS OF TUNABLE MONOLAYER MoS<sub>2</sub> NANOELECTROMECHANICAL RESONATORS

Large-Scale Arrays of Tunable Monolayer MoS<inf>2</inf> Nanoelectromechanical Resonators

Large-Scale Arrays of Single- and Few-Layer MoS2 Nanomechanical Resonators

Electrically tunable single- and few-layer MoS 2 nanoelectromechanical systems with broad dynamic range.

Local-gate Electrical Actuation, Detection, and Tuning of Atomic-Layer M0S2 Nanoelectromechanical Resonators

Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale Molybdenum Disulfide Nems Resonator Arrays

Frequency scaling of molybdenum disulfide (MoS 2 ) two-dimensional (2D) nanomechanical resonators

Tuning the Resonance Properties of 2D Carbon Nanotube Networks Towards a Mechanical Resonator

All-electrical Readout of Atomically-Thin MoS2 Nanoelectromechanical Resonators in the VHF Band

High Frequency MoS2 Nanomechanical Resonators.

Two-dimensional MoS2 Nanomechanical Resonators Freelysuspended on Microtrenches on Flexible Substrate

Single- and Few-Layer Transfer-Printed CVD MoS2 Nanomechanical Resonators with Enhancement by Thermal Annealing

Thermal Hysteresis Controlled Reconfigurable MoS2 Nanomechanical Resonators.

Raman Spectroscopic Probe for Nonlinear MoS2 Nanoelectromechanical Resonators.

Molybdenum Disulfide (mos2) Nanomechanical Resonators Integrated on Microchannels

Strain-Modulated Dissipation in Two-Dimensional Molybdenum Disulfide Nanoelectromechanical Resonators.

Exploiting Irregular MoS2 Nanostructures for Very High Frequency (VHF) Nanomechanical Resonators with Mode Shape Engineering and Frequency Control

Dynamic Photochemical and Optoelectronic Control of Photonic Fano Resonances via Monolayer MoS2 Trions.

Extreme mechanical tunability in suspended MoS 2 resonator controlled by Joule heating

Strain-enhanced dynamic ranges in two-dimensional MoS2 and MoTe2 nanomechanical resonators

Tuning Strain and Quality Factor of 2D MoS2 NEMS Resonators Using Annealing and Electrostatic Gating