Reactive Magnetron Sputtering to Enhance the Hydrogen Permeation Performance of NbC/V Composite Membranes

Jingjing Liu,Xinzhong Li,Xiao Liang,Hengzhi Fu,Jingjie Guo,Dongmei Liu

DOI: https://doi.org/10.1016/j.matchemphys.2023.127769

IF: 4.778

2023-01-01

Materials Chemistry and Physics

Abstract:Niobium carbide (NbC) catalytic films were deposited on the surface of vanadium (V) substrates by reactive magnetron sputtering (RMS) using CH4 as the carbon source to form the NbC/V composite membranes for hydrogen separation and purification. The effects of CH4 gas flow ratio (F-CH4 = CH4/(CH4+Ar)) on the phase structure, surface microstructure and catalytic properties of NbC films and the hydrogen permeation performance of the NbC/V composite membranes were investigated. The results showed that the structure of the NbC catalytic film changed from the dual-phase of NbC and Nb2C to the single-phase of cubic NbC after the addition of CH4 gas. Furthermore, with the increase of F-CH4, the carbon content in the NbC catalytic films increases, but the crystallinity decreases. When F-CH4 is 5%, the hydrogen permeation performance of the NbC/V composite membrane is the highest, which is attributed to the appropriate carbon content and crystallinity of the NbC phase. Typically, the hydrogen permeability is 7.0 x 10(-8) mol H-2 m(-1) s(-1) Pa-0.5 at 650 degrees C, which is 2.4 times that of pure Pd.