Abstract:A highly‐sensitive piezoresistive sensor based on 3D MXene/polyetherimide network is proposed. The sensor exhibits ultrahigh sensitivity in a wide temperature range from 80 kPa−1 at −5 °C to 20 kPa−1 at 150 °C, low detection limit of 9 Pa, outstanding durability over 10 000 cycles at room temperature, 2000 cycles at 100 °C and 500 cycles at −5 °C. With the increasing popularity of smart wearable devices, flexible pressure sensors are highly desired in various complex application scenarios. A great challenge for existing flexible pressure sensors is to maintain high sensitivity over a wide temperature range, which is critical for their applications in harsh environments. Herein, a flexible piezoresistive sensor made of polyetherimide (PEI) fibrous network evenly covered with MXene nanosheets is reported to construct conductive pathways, showing ultrahigh sensitivity over a wide temperature range from −5 °C (sensitivity of 80 kPa−1) to 150 °C (20 kPa−1), low detection limit of 9 Pa, fast response time of 163 ms, outstanding durability over 10 000 cycles at room temperature, 2000 cycles at 100 °C and 500 cycles at −5 °C. The pressure sensor can monitor various human activities in real‐time, apply to human–machine interaction, and measure pressure distribution. It also can sensitively respond to external mechanical stimuli at 150 °C and extremely low temperature (in liquid nitrogen). Moreover, the fibrous network exhibits an excellent Joule heating performance, which can reach 78 °C at an applied voltage of 12 V. Thus, the piezoresistive sensor has considerable potential for wearable garments and personal heating applications in harsh temperature conditions.

Research on High Temperature Performance of Pressure Sensor

A High-Temperature Piezoresistive Pressure Sensor with an Integrated Signal-Conditioning Circuit

High temperature pressure sensor using a thermostable electrode

Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor

MoS2high temperature sensitive element with a single Si3N4protective layer

Development of Highly Sensitive and Thermostable Microelectromechanical System Pressure Sensor Based on Array-Type Aluminum–Silicon Hybrid Structures

A Microwave Pressure Sensor Loaded with Complementary Split Ring Resonator for High-Temperature Applications

Design and evaluation of oil-filled isolated high temperature piezoresistive pressure sensor

Silicon on Insulator Pressure Sensor Based on A Thermostable Electrode for High Temperature Applications

Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications

MoS 2 high temperature sensitive element with a single Si 3 N 4 protective layer

3D MXene‐Based Flexible Network for High‐Performance Pressure Sensor with a Wide Temperature Range

High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment

Design optimization of high pressure and high temperature piezoresistive pressure sensor for high sensitivity

Mems Pressure Sensors for High-Temperature High-Pressure Downhole Applications

Fabrication and temperature coefficient compensation technology of low cost high temperature pressure sensor

MgO Single Crystals MEMS-Based Fiber-Optic Fabry–Perot Pressure Sensor for Harsh Monitoring

Performance Study of F-P Pressure Sensor Based on Three-Wavelength Demodulation: High-Temperature, High-Pressure, and High-Dynamic Measurements

Liquid-free, piezoresistive, SOI-based pressure sensor for high temperature measurements up to 400 °C

A Harsh Environment Wireless Pressure Sensing Solution Utilizing High Temperature Electronics