Mems Pressure Sensors for High-Temperature High-Pressure Downhole Applications

Fan Zeng,Lei Lu,Yiming Zhang,Shichao Guo,Man Wong,Kevin Chau
DOI: https://doi.org/10.1109/edssc.2016.7785205
2016-01-01
Abstract:This paper outlines the approach to realize a MEMS pressure sensor suitable for meeting the stringent requirements of sensing in a downhole environment reaching 175- o C temperature and 200-MPa pressure while maintaining an accuracy of better than 0.02% for an extended measurement period of several weeks during oil and gas exploration. A few sensing structures are proposed and strategies for their optimization are discussed for this unique application.
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