Surface Topography Measurement Technology Based on Optical Frequency Comb

Wu Guanhao,Shi Liheng,Li Erge
DOI: https://doi.org/10.3788/lop223339
2023-01-01
Laser & Optoelectronics Progress
Abstract:Surface topography measurement is one of the key technologies for industrial production and scientific research, and the pursuit of high accuracy and high efficiency has always been the direction of the field. With its unique broad spectrum, narrow linewidth, and stable frequency characteristics, optical frequency combs show superior metrology potential and have been developed for a variety of topography measurement techniques. First, the definition of optical frequency combs is introduced; the current research status and characteristics of optical frequency combs in topography measurement are categorized and reviewed according to different technical lines; finally, the outlook of optical frequency comb-based topography measurement techniques is presented.
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