Optimal Impurity Distribution Model and Experimental Verification of Variation of Lateral Doping Termination

Min Ren,Chang-Yu Ye,Jian-Yu Zhou,Xin Zhang,Fang Zheng,Rong-Yao Ma,Ze-Hong Li,Bo Zhang
DOI: https://doi.org/10.1088/1674-1056/acbd29
2023-01-01
Abstract:Based on the charge balance principle,an optimal impurity distribution variation of lateral doping termination(OID-VLD)and its ion-injection mask design method are proposed and verified.The comparative simulations and experiments show that OID-VLD can achieve better blocking ability and reliability than the traditional VLD(T-VLD).Vertical double diffusion MOSFET(VDMOS)with OID-VLD achieved breakdown voltage(BV)of 1684 V and passed the 168 hours 100℃-110℃-120℃-125℃high-temperature reverse bias(HTRB)test,while VDMOS with T-VLD obtained BV of 1636 V and failed in the 20 hours 120℃HTRB test.
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