Abstract:Cavity optomechanical systems have enabled precision sensing of magnetic fields, by leveraging the optical resonance-enhanced readout and mechanical resonance-enhanced response. Previous studies have successfully achieved scalable and reproducible microcavity optomechanical magnetometry (MCOM) by incorporating Terfenol-D thin films into high-quality ($Q$) factor whispering gallery mode (WGM) microcavities. However, the sensitivity was limited to 585 pT/Hz$^{1/2}$, over 20 times inferior to those using Terfenol-D particles. In this work, we propose and demonstrate a high-sensitivity and scalable MCOM approach by sputtering a FeGaB thin film onto a high-$Q$ SiO$_2$ WGM microdisk. Theoretical studies are conducted to explore the magnetic actuation constant and noise-limited sensitivity by varying the parameters of the FeGaB film and SiO$_2$ microdisk. Multiple magnetometers with different radii are fabricated and characterized. By utilizing a microdisk with a radius of 355 $\mu$m and a thickness of 1 $\mu$m, along with a FeGaB film with a radius of 330 $\mu$m and a thickness of 1.3 $\mu$m, we have achieved a remarkable peak sensitivity of 1.68 pT/Hz$^{1/2}$ at 9.52 MHz. This represents a significant improvement of over two orders of magnitude compared with previous studies employing sputtered Terfenol-D film. Notably, the magnetometer operates without a bias magnetic field, thanks to the remarkable soft magnetic properties of the FeGaB film. Furthermore, as a proof-of-concept, we have demonstrated the real-time measurement of a pulsed magnetic field simulating the corona current in a high-voltage transmission line using our developed magnetometer. These high-sensitivity magnetometers hold great potential for various applications, such as magnetic induction tomography and corona current monitoring.

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Observation of Nonlinearity and Heating-Induced Frequency Shifts in Cavity Magnonics

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Optomagnonic Whispering Gallery Microresonators

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Design and Analyses of a MEMS Based Resonant Magnetometer

Design, Fabrication and Characterization of a Resonant Magnetic Field Sensor Based on Mechanically Coupled Dual-Microresonator

High Resolution Magnetometer Based on a High Frequency Magnetoelectric MEMS-CMOS Oscillator

A dual-channel optical magnetometer based on magnetically responsive inverse opal microspheres

Bidirectional Tuning of Whispering Gallery Modes in a Silica Microbubble Infiltrated with Magnetic Fluids

Sandwich structure magnetometer with a high sensitivity and signal-to-noise ratio based on an ultrahigh-Q CaF2 resonator