Efficient Fabrication Method for Non-Periodic Microstructures Using One-Step Two-Photon Lithography and a Metal Lift-off Process

Yu Xie,Jianxiong Chen,Hang Xu,Yujie Zhang,Quancheng Chen
DOI: https://doi.org/10.1364/ao.478893
IF: 1.9
2023-01-01
Applied Optics
Abstract:This paper presents a mask-less, flexible, efficient, and high-resolution fabrication method for non-periodic microstructures. Sub-wavelength micro-polarizer arrays, (MPAs) which are the most essential part of the focal plane polarimeters, are typical non-periodic structures. The grating ridges of each polarizer were oriented in four different directions offset by 45 degrees, corresponding to different polarization directions. The finite element method was introduced to optimize the structural parameters of the MPA in the far-infrared region. The numerical results demonstrated that the designed MPA had a TM transmittance of more than 55% and an extinction ratio no less than 7 dB. An aluminum MPA that operates in the 8-14 mu m infrared region was prepared by one-step two-photon lithography (TPL) and the metal lift-off process. The femtosecond laser exposed the photoresist with only a single scan, making TPL very efficient. The fabricated single-layer sub-wavelength MPAs with a period of 3 mu m, a duty cycle of 0.35-0.5, and a height of 150 nm, were analyzed by an optical microscope and an atomic force microscope. The successful fabrication of the MPA indicated that one-step TPL could be a viable and efficient method for pattern preparation in the fabrication of non-periodic microstructures. (c) 2023 Optica Publishing Group
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