Abstract:High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation in complementary metal oxide semiconductor (CMOS) process. Aiming at the urgent need for high-precision MEMS accelerometers in geophones, we carried out relevant research on high-performance closed-loop application specific integrated circuit (ASIC) chips. According to the characteristics of the performance parameters and output signal of MEMS accelerometers used in geophones, a high-precision closed-loop interface ASIC chip based on electrostatic time-multiplexing feedback technology and proportion integration differentiation (PID) feedback control technology was designed and implemented. The interface circuit consisted of a low-noise charge-sensitive amplifier (CSA), a sampling and holding circuit, and a PID feedback circuit. We analyzed and optimized the noise characteristics of the interface circuit and used a capacitance compensation array method to eliminate misalignment of the sensitive element. The correlated double sampling (CDS) technology was used to eliminate low-frequency noise and offset of the interface circuit. The layout design and engineering batch chip were fabricated by a standard 0.35 μm CMOS process. The active area of the chip was 3.2 mm × 3 mm. We tested the performance of the accelerometer system with the following conditions: power dissipation of 7.7 mW with a 5 V power supply and noise density less than 0.5 μg/Hz1/2. The accelerometers had a sensitivity of 1.2 V/g and an input range of ±1.2 g. The nonlinearity was 0.15%, and the bias instability was about 50 μg.

A Fully Integrated Miniatured Capacitive Angle Encoder Based on MEMS Fabrication and ASIC Implementation

A Miniatured Fully Integrated High Resolution and Accuracy Capacitive Angle Encoder

An Analog Interface Circuit For Capacitive Angle Encoder Based On A Capacitance Elimination Array And Synchronous Switch Demodulation Method

Online Demodulation of Miniatured Capacitive Angular Position Sensor based on ASIC Implementation

High-Precision Incremental Capacitive Angle Encoder Developed by Micro Fabrication Technology

An ASIC Solution for Intelligent Electrodes and Active-Cable Used in a Wearable ECG Monitoring System.

A Multi-Parameter Bio-Electric ASIC Sensor with Integrated 2-Wire Data Transmission Protocol for Wearable Healthcare System

Digital Capacitance Measurement System Based on FPGA

A Closed-Loop Mems Accelerometer with Capacitive Sensing Interface Asic

An Encoding ASIC With Real‐Time Correction for Inductive Angular Sensing Systems

Closed-loop Micro-Accelerometer Based on Capacitive Sensing Interface ASIC

A Capacitive Rotary Encoder with a Novel Sensitive Electrode

A Low-noise High-voltage Interface Circuit for Capacitive MEMS Gyroscope.

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving

A Digital-Analog Hybrid System-on-Chip for Capacitive Sensor Measurement and Control.

Design, Optimization, and Compensation of a High-Precision Single-Excitation Absolute Capacitance Angular Encoder up to ±4<inline-formula><tex-math notation="LaTeX">$^{\prime\prime}$</tex-math></inline-formula>

An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control

A Pseudo-Differential Capacitive MEMS Accelerometer Analog Front-End Design

A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes

Design, Optimization, and Compensation of a High-Precision Single-Excitation Absolute Capacitance Angular Encoder Up to ±4$^{\Prime\prime}$