Novel method of keeping constant temperature in nano actuator performance measurement

Chen Hong,Wang Qiang,Yang Sheng,Wang Jungang,Jiang Bing,Cao Kun
2013-07-26
Abstract:To guarantee the accuracy of nanometer displacement measurement, the high-precision control on the temperature of measuring environment must be carried out. In order to meet the practical needs of nanometer displacement measurement, a new concept which is constant temperature time window has been brought forward, as well as a low cost but high-precision project based on the concept. Preliminary research indicates that the realization of 0.001°C constant temperature precision and one-minute measurement interval is easy as long as the cover has good sealing performance even with common adiabatic materials. The measured static characteristics of the great-driving-force and high-rigidity nano actuator prototype show that the control system based on constant temperature time window principle mentioned in this paper could meet the practical needs of nanometer displacement measurement.
Engineering,Materials Science,Physics
What problem does this paper attempt to address?