Approach Of Decreasing Effect Of Temperature On Positioning Accuracy Of Ultra-Precision Micro-Feed System

Li Zhong,Zhenliang Ding,Feng Yuan
DOI: https://doi.org/10.1109/NEMS.2006.334894
2006-01-01
Abstract:Ultra-precision flexure-hinge guided micro-feed system driven by piezoelectric actuator was applied in many fields in which precise motion was needed. Temperature effects on positioning accuracy of system are analyzed. The temperature measurement and control system are described for the compensation of temperature errors on micro-feed stage and interferometer measurement. The temperature control system kept temperature variation of 0.1 degrees C at 20 degrees C, and 0.05 degrees C temperature drift, which can meet the limit of precise positioning accuracy of micro-feed system.
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